What does the reticle stage do in High NA EUV lithography? | ASML | Harold Bol
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What’s the reticle in a lithography system? Find out in this clip. Check out all our EUV systems, and the technology behind them: http://ms.spr.ly/6182wLVGO | ASML
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What role does the reticle stage play in High NA extreme ultraviolet (EUV) lithography? In this video, learn how the reticle stage enables patterning in advanced chipmaking. You’ll see how 13.5 nanometer EUV light reflected into the system gets shaped by the illuminator and how a chip pattern gets encoded into the light for lithography. | ASML
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EUV lithography optics from ZEISS
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The reticle and reticle stage - Inside the TWINSCAN NXE:3400 EUV lithography machine | ASML on Make a GIF
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Reticle stage for High NA EUV | ASML | 120 comments
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